V.OX-TEC GmbH & Co. KG
VOXTEC belongs for over 20 years to the qualified suppliers of process- and consumable parts for semiconductor technology (ETCH, CVD, PCD, IIP), as well as for the solar and aerospace industries.
As an internationally recognized second-source supplier for the semiconductor industry, the focus of the company is specifically on:
- CNC mechanical production
- Small series
- Precision manufacturing
- Surface treatment
- Cleaning incl copper area.
- Clean Room packaging
Of the various OEM plant components such as from AMAT, LAM, Novellus, TEL, the company has specialized in production, reworks and their cleansing. This includes for example: Clamp rings, DPS chambers, etch chambers, shields, liners, focus rings, carrier, screws and much more. Plus of course, the processing and manufacturing of electrostatic chucks (ESC SLT, MCA ESC, polyimide E-Chuck).
VOXTEC is also partner for various coating processes, according to customer requirements or specification, diverse modules are coated by sputtering, anodizing, hardcoat- anodizing, plus plasma, yttria and Teflon coatings as required.
As a second-source supplier, we offer a variety of cost-saving potentials through modifications, R & D, specific production and refurbishment know-how. Belonging to this of course, is the planning and implementation of consignment stocks.