V.OX-TEC GmbH & Co. KG

VOXTEC belongs for over 20 years to the qualified suppliers of process- and consumable parts for semiconductor technology (ETCH, CVD, PCD, IIP), as well as for the solar and aerospace industries.

As an internationally recognized second-source supplier for the semiconductor industry, the focus of the company is specifically on:

  • CNC mechanical production
  • Small series
  • Modifications
  • Precision manufacturing
  • Rework
  • Metrology
  • Surface treatment
  • Coatings
  • Cleaning incl copper area.
  • Clean Room packaging

Of the various OEM plant components such as from AMAT, LAM, Novellus, TEL, the company has specialized in production, reworks and their cleansing. This includes for example: Clamp rings, DPS chambers, etch chambers, shields, liners, focus rings, carrier, screws and much more. Plus of course, the processing and manufacturing of electrostatic chucks (ESC SLT, MCA ESC, polyimide E-Chuck).

VOXTEC is also partner for various coating processes, according to customer requirements or specification, diverse modules are coated by sputtering, anodizing, hardcoat- anodizing, plus plasma, yttria and Teflon coatings as required.

As a second-source supplier, we offer a variety of cost-saving potentials through modifications, R & D, specific production and refurbishment know-how. Belonging to this of course, is the planning and implementation of consignment stocks.