From new part development
to series production

New & Spare Parts

Components for different applications require different materials, alloys and specific technical know-how. Our wide product range includes various semicon spare parts, consumables, 2nd source parts and modified parts.

We process materials such as:

Metals:
Stainless Steel, Aluminum as well as refractory metals

Plastics:
Polyimides for example, Peek, PTFE, POM, Teflon, Delrin,
Torlon, Duratron, Vespel

Graphite/Ceramics/Silicon:
Oxide ceramics, non-oxide ceramics, silicon, silicon carbide

Thanks to our partners, we can also process other materials.
Please do not hesitate to get in touch with your specific requirements.

With the Properties of a New Part

Refurbishment Processes

As an alternative to buying new, our comprehensive and integrated processes enable the refurbishment of used components – from old to new! Modification requests can be implemented directly into the refurbishment process.

In addition to consumable parts and 2nd source parts, our portfolio also includes numerous types of ESCs (e-chucks) and a multitude of other components related to equipment in the semiconductor industry.

• Polyimide ESC
• Ceramic ESC
• Endura MCA, Endura SLT (TiN Coating)
• Vacuum ESC
• Heater
• Chamber parts

Thanks to extensive tests carried out at our on-site teststands,
we can ensure the highest quality of components.

High Specification
Cleaning

Cleaning & Copper Area

We clean components made of aluminum, titanium, stainless steel, sintered metals, quartz and all types of ceramics and plastics whilst also eliminating any form of contamination.

In our certified Copper Area, contaminated parts are treated separately.

Thanks to our soft cleaning approach and the flexible application of appropriate cleaning methods, we can solve complex problems and develop cleaning techniques that meet highest requirements.

Our new parts, modifications and refurbished parts can be delivered with clean room packaging class ISO5.

For complete Assemblies

Refurbished Assemblies

Due to our in-house expertise and many years of experience,
we can repair the most varied assemblies with three steps:
1. Disassembly 2. Overhaul 3. Assembly.
Electronic and mechanical functions are inspected with our test equipment.

Together with our refurbishment, assembly processes and the use of high-quality spare parts, we can ensure a long service life of assemblies.

Our standard refurbishment assemblies include:

• Harmonic Drive
• Inner Gate, Outer Gate
• Inner Door Assy
• RF Mini Match and Low Fat Match
• Lifter
• Cylinders and actuators
• VAT Valves and other valves

Ask for your specific part - we offer a broad range of rework assemblies!

Turning, Milling and Grinding

CNC Machining

We can guarantee the highest quality production of samples/prototypes, individual parts and parts for series with our variety of state-of-the-art CNC machining centres.

Main Areas:

• Precision manufacturing
• Prototype construction, fixture construction
• Production of mechanical assemblies
• Assembly of mechanical components
• In-house development

For New Parts and Rework

Surface Technology

Official Distributor

DuPont Kalrez ®

As the official distributor of Dupont Kalrez ® products, we are the leading supplier of Elastomers in Germany.

Due to the large quantity of products we have in stock, we are able to offer you short delivery times. Alternatively, we can offer you
a consignment warehouse service.

We can also offer other materials including, Viton,
NBR and Silicone.